![]()
Semiconductor Fabrication Process & General Exhaust Ventilation
- Cleanroom Compatible – Low-leakage, high-efficiency designs built for precision environments.
- Corrosion Resistance – Withstand HF, HCl, and other aggressive gases used in etching and CMP.
- Dependable Operation – Designed for 24/7 uptime in the world’s most demanding facilities.
- Versatility – Suited for wet benches, fume scrubbers, tool exhaust, and room-level air management.
- Customizable Performance – Configurations that integrate with building systems and cleanroom controls.
To support clean, safe, and efficient airflow in your semiconductor or advanced manufacturing facility, partner with Hartzell Air Movement.
Application Overview
Semiconductor fabrication facilities require precise and continuous ventilation to maintain cleanroom standards, control toxic fume emissions, and remove heat from sensitive processes. From acid exhaust in wet benches, to general room exhaust in clean zones, Hartzell’s corrosion-resistant and clean-air-capable fans provide dependable airflow in mission-critical environments.
Industries
- Semiconductor Fabrication Plants (Fabs) – For microchips, processors, and memory production.
- Photovoltaic (Solar Cell) Manufacturing – Involving similar chemical and particulate exhaust.
- Display Panel Manufacturing – Requiring cleanroom-level air control for LCD and OLED production.
Advanced Packaging & Electronics Assembly – Where miniaturized components demand particle-free environments.
Common Fan Designs
- Fiberglass Centrifugal Fans – Ideal for corrosive gas exhaust systems and wet scrubber support.
- Belt and Direct Drive Fans – For precision air volume control in controlled environments.
- Backward-Inclined and Airfoil Fans – High-efficiency designs for cleanroom or high-volume air.
- Roof and Wall Exhausters – For general facility or point-source exhaust.
Common Accessories for Semiconductor Facilities
- HEPA/ULPA Filter Integration – Ensures compliance with Class 1–1000 cleanroom standards.
- Corrosion-Resistant Construction – Required for acidic fume and solvent vapor handling.
- VFD Integration – Enables dynamic airflow based on cleanroom demand or tool load.
Insulated Housings and Sound Attenuation – Reduce vibration and maintain quiet operation.
![]()
Benefits of Hartzell Air Movement Products for Semiconductor Facilities
- Cleanroom Compatible – Low-leakage, high-efficiency designs built for precision environments.
- Corrosion Resistance – Withstand HF, HCl, and other aggressive gases used in etching and CMP.
- Dependable Operation – Designed for 24/7 uptime in the world’s most demanding facilities.
- Versatility – Suited for wet benches, fume scrubbers, tool exhaust, and room-level air management.
- Customizable Performance – Configurations that integrate with building systems and cleanroom controls.
To support clean, safe, and efficient airflow in your semiconductor or advanced manufacturing facility, partner with Hartzell Air Movement.
